9

Sputtering of SiO2 in O2Ar atmospheres

Year:
1986
Language:
english
File:
PDF, 370 KB
english, 1986
18

Deposition dependence of r.f.-sputtered CdS films

Year:
1982
Language:
english
File:
PDF, 285 KB
english, 1982
21

Electrical properties of R.F.-sputtered SiO2 films

Year:
1985
Language:
english
File:
PDF, 290 KB
english, 1985